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Volumn 79, Issue 3, 2004, Pages 489-497

Laser-assisted deposition of thin films from photoexcited vapour phases

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; CHEMICAL VAPOR DEPOSITION; CHROMIUM COMPOUNDS; ELECTRIC INSULATORS; FABRICATION; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR MATERIALS;

EID: 3042764326     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2566-5     Document Type: Review
Times cited : (21)

References (88)
  • 4
    • 0026239316 scopus 로고
    • O. Lehmann, M. Stuke: Appl. Phys. A 53, 343 (1991); O. Lehmann, M. Stuke: Mater. Lett. 21, 131 (1994)
    • (1991) Appl. Phys. A , vol.53 , pp. 343
    • Lehmann, O.1    Stuke, M.2
  • 5
    • 0028523309 scopus 로고
    • O. Lehmann, M. Stuke: Appl. Phys. A 53, 343 (1991); O. Lehmann, M. Stuke: Mater. Lett. 21, 131 (1994)
    • (1994) Mater. Lett. , vol.21 , pp. 131
    • Lehmann, O.1    Stuke, M.2
  • 21
    • 0000690835 scopus 로고
    • Materials Science and Technology, ed. by M.V. Swain (VCH Publishers, Weinheim)
    • R. Telle: In Structure and Properties of Ceramics, Materials Science and Technology, Vol. 11, ed. by M.V. Swain (VCH Publishers, Weinheim 1994) p. 173
    • (1994) Structure and Properties of Ceramics , vol.11 , pp. 173
    • Telle, R.1
  • 84
    • 3042730844 scopus 로고    scopus 로고
    • Ph.D. Thesis, University of Lisbon (work in progress)
    • P.M. Sousa: Ph.D. Thesis, University of Lisbon (work in progress)
    • Sousa, P.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.