Deposition of boron carbide thin film by supersonic plasma jet CVD with secondary discharge

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 247-252

  Postel, O ^a   Heberlein, J ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

Boron carbide; Hard coating; Plasma jet CVD; Positive bias

Indexed keywords

BORON CARBIDE; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; FILM GROWTH; MECHANICAL VARIABLES MEASUREMENT; METHANE; PLASMA JETS; SILICON; SUBSTRATES; THERMAL EFFECTS; VICKERS HARDNESS TESTING;

BORON TRICHLORIDE; HARD COATINGS;

CERAMIC COATINGS;

EID: 0040610697     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00661-6     Document Type: Article

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