Silicon nanopillars for mechanical single-electron transport

Applied Physics Letters

Volumn 84, Issue 23, 2004, Pages 4632-4634

  Scheible, Dominik V ^a   Blick, Robert H ^b  

^a UNIVERSITY OF MUNICH   (Germany)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREE-STANDING ISOLATING NANOPILLARS; SILICON NANOPILLARS; SINGLE-ELECTRON TRANSPORT;

DEGREES OF FREEDOM (MECHANICS); ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTROMECHANICAL DEVICES; ELECTRON BEAM LITHOGRAPHY; ELECTRON TRANSITIONS; REACTIVE ION ETCHING; RESONATORS; SILICON; TRANSISTORS;

NANOSTRUCTURED MATERIALS;

EID: 3042644627     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1759371     Document Type: Article

References (14)

1. R. H. Blick, A. Erbe, L. Pescini, A. Kraus, D. V. Scheible, F. W. Beil, E. Höhberger, A. Hörner, J. Kirschbaum, H. Lorenz, and J. P. Kotthaus, J. Phys.: Condens. Matter 14, R905 (2002).
2. X. M. H. Huang, C. A. Zorman, M. Mehregany, and M. L. Roukes, Nature (London) 421, 496 (2003).
3. D. V. Scheible, A. Erbe, and R. H. Blick, Appl. Phys. Lett. 82, 3333 (2003).
4. D. V. Scheible, A. Erbe, G. Corso, and R. H. Blick, Appl. Phys. Lett. 81, 1884 (2002).
5. M. L. Roukes, Phys. World 14, 25 (2001).
6. C. T.-C. Nguyen, IEEE Trans. Microwave Theory Tech. 47, 1486 (1999).
7. N. Maluf, An Introduction to Microelectromechanical Systems Engineering (Artech House, Norwood, MA, 2000).
8. A. Erbe, C. Weiss, W. Zwerger, and R. H. Blick, Phys. Rev. Lett. 87, 096106 (2001).
9. D. V. Scheible, A. Erbe, and R. H. Blick, New J. Phys. 4, 86.1 (2002).
10. L. Y. Gorelik, A. Isacsson, M. V. Voinova, B. Kasemo, R. I. Shekhter, and M. Jonson, Phys. Rev. Lett. 80, 4526 (1998).
11. C. Weiss and W. Zwerger, Europhys. Lett. 47, 97 (1999).
12. MAFIA finite element system for Maxwell equations (v. 3.20).
13. F. K. Kneubühl, Oscillations and Waves (Springer, Berlin, 1997).
14. SOLVIA finite element system for mechanical eigenmodes (v. 99.0).