High sensitive micro touch sensor with piezoelectric thin film for micro pipetting works under microscope

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2004, Issue 2, 2004, Pages 1352-1357

  Arai, Fumihito ^a   Motoo, Kouhei ^a   Fukuda, Toshio ^a   Katsuragi, Tohoru ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Hydrothermal method; Microbe; Micromanipulation; PZT; Separation; Touch sensor; Vibration type sensor

Indexed keywords

CONTACT SENSORS; FINITE ELEMENT METHOD; MICROELECTRONICS; MICROMANIPULATORS; MICROSCOPES; VIBRATIONS (MECHANICAL);

MECHANICAL IMPEDANCE; MICRO PIPETTING; MICRO TOUCH SENSORS; VIBRATION TYPE SENSORS;

ROBOTICS;

EID: 3042585554     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/robot.2004.1308012     Document Type: Conference Paper

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