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Volumn 23, Issue 11, 2005, Pages 3832-3842

Design, fabrication, and characterization of deep-etched waveguide gratings

Author keywords

Defect waveguides; Diffraction; Graftings; Photonic crystals; Reflection; Semiconductor waveguides

Indexed keywords

CHARACTERIZATION; CRYSTALS; ELECTRON BEAM LITHOGRAPHY; LIGHT PROPAGATION; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTICAL DESIGN; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR GROWTH;

EID: 30344442430     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2005.857737     Document Type: Article
Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.