Fabrication of low loss, waveguide grating filters using electron beam lithography

Electronics Letters

Volumn 33, Issue 12, 1997, Pages 1031-1032

  Millar, P ^a   Harkins, R ^a   Aitchison, J S ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

Grating filters; Waveguides

Indexed keywords

DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE SCATTERING; ELECTRON BEAM LITHOGRAPHY; FABRY-PEROT INTERFEROMETERS; OPTICAL WAVEGUIDES; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE;

BRAGG GRATINGS; DUTY CYCLE;

OPTICAL FILTERS;

EID: 0031554346     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19970712     Document Type: Article

References (6)

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