High performance thin film transistors (TFTS) of polycrystalline silicon crystallized by the double laser crystallization (DLC) technique

Proceedings of the ASME Summer Heat Transfer Conference

Volumn 3, Issue , 2005, Pages 271-276

  Xu, Li ^a   Grigoropoulos, Costas P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE LASER CRYSTALLIZATION (DLC); ELECTRICAL PERFORMANCE; SATURATION RANGE;

CRYSTAL GROWTH; CRYSTALLIZATION; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION; THIN FILM TRANSISTORS;

SILICON;

EID: 29644444037     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/HT2005-72223     Document Type: Conference Paper

References (11)

1. F. Plais, P. Legagneux, C. Reita, O. Huet, F. Petinot, D. Pribat, B. Godard, M. Stehle, and E. Fogarassy, Microelecton. Eng., vol. 28, (1995) 443
2. H.J. Kim, J.S. Im, M.O. Thomson, Mater. Res. Soc. Symp. Proc. 283 (1993) 703
3. iiii R.S. Sposili and J. S. Im, Appl. Phys. Lett. 69, 2864, 1996
4. C. Oh, M. Ozawa and M. Matsumura, Jpn. J. Appl. Phys. 37, L492, 1998
5. R. Ishihara and A. Burtsev, Jpn. J. Appl. Phys. 373B, 1071, 1998
6. R. Ishihara, Mat. Res. Soc. Symp. Proc. 621, Q9.4.1, 2000
7. M. Lee, S. Moon, M. Hatano, C.P. Grigoropoulos: Appl. Phys. A73, 317-322, 2001
8. G.E. Jellison, Jr. and D.H. Lowndes, Appl. Phys. Lett. 51(5), Aug 1987
9. E.D. Palik, Handbook of Optical Constants for Solids I, II, Academic Press, Inc. 1991
10. F. Secco d'Aragona, J. Electrochem. Soc. 119 (1972) 948
11. M. Lee, S. Moon, M. Hatano, K. Suzuki, and C. P. Grigoropoulos, J. of Appl. Phys. Vol. 88, number 9, 4994