Location control of large grain following excimer-laser melting of Si thin-films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 3 B, 1998, Pages 1071-1075

  Ishihara, Ryoichi ^a   Burtsev, Artyom ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Excimer laser; Nucleation control; Single crystal silicon; SOI; Thin film transistors

Indexed keywords

EID: 0001243799     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.1071     Document Type: Article

References (22)

1. T. Sameshima, S. Usui and M. Sekiya: IEEE Electron Device Lett. 7 (1986) 276.
2. K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko and K. Hotta: IEEE Trans. Electron Devices 36 (1989) 2868.
3. N. Yamauchi and R. Reif: J. Appl. Phys. 75 (1994) 3235.
4. R. Ishihara and M. Matsumura: Electron. Lett. 22 (1995) 1956.
5. R. Ishihara and M. Matsumura: Jpn. J. Appl. Phys. 36 (1997) 6167.
6. M. Tamura, H. Tamura and T. Tokuyama: Jpn. J. Appl. Phys. 19 (1980) L23.
7. J. P. Colinge, E. Demoulin, D. Bensahel and G. Anvert: Appl. Phys. Lett. 41 (1982) 346.
8. R. S. Sposili, M. A. Crowder and J. S. Im: Mater. Res. Soc. Symp. Proc. 452 (1997) 953.
9. R. Ishihara and P. C. van der Wilt: Jpn. J. Appl. Phys. 37 (1998) LIS.
10. T. Sameshima, M. Hara and S. Usui: Jpn. J. Appl. Phys. 29 (1990) L1363.
11. J. S. Im and H. J. Kim: Appl. Phys. Lett. 63 (1993) 196.
12. R. Ishihara, W.-C. Yeh, T. Hattori and M. Matsumura: Jpn. J. Appl. Phys. 34 (1995) 1759.
13. S. R. Stiffer and M. O. Thompson: Phys. Rev. Lett. 60 (1988) 2519.
14. K. Shimizu, O. Sugiura and M. Matsumura: IEEE Trans. Electron Devices 40 (1993) 112.
15. H. C. Webber, A. G. Cullis and N. G. Chew: Appl. Phys. Lett. 43 (1983) 669.
16. A. Goldsmith, T. E. Waterman and H. J. Hirschhorn: Handbook of Thermophysical Properties of Solid Materials (Pergamon, New York, 1961) Vol. 1.
17. K. Raẑnjević: Handbook of Thermodymamic Tables and Charts (McGraw-Hill, New York, 1976) p. 23.
18. C. K. Ong, H. S. Tan, E. H. Sin: Mater. Sci. & Eng. A 103 (1988) 273.
19. A. E. Bell: RCA Rev. 40 (1979) 295.
20. Y. S. Touloukian and E. H. Buyco: Thermophysical Properties of Matter (IFI/P, New York, 1970) Vol. 2.
21. H. R. Philipp and E. A. Taft: Phys. Rev. 120 (1960) 37.
22. L. A. Lompé, J. M. Liu, H. Kurtz and N. Boloembergen: Appl. Phys. Lett. 43 (1983) 168.