Real-time observation for the formation of microlens arrays fabricated using thermal reflow process

Tamkang Journal of Science and Engineering

Volumn 7, Issue 2, 2004, Pages 81-86

  Wei, Mao Kuo ^a   Su, I Ling ^b   Jung, Ming Chang ^a   Huang, Kai Wen ^a  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

Microlens; Real time Monitor; Thermal Reflow

Indexed keywords

CHARGE COUPLED DEVICES; FREE ENERGY; GLASS TRANSITION; LIGHT ABSORPTION; LIGHT REFLECTION; MORPHOLOGY; PHOTORESISTS; REDUCTION; SCANNING ELECTRON MICROSCOPY; THERMOPLASTICS;

FIBER COUPLING; LIGHT GATHERING; REAL-TIME MONITORS; THERMAL REFLOW PROCESS;

MICROLENSES;

EID: 2942718908     PISSN: 15606686     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (10)

1. Park, E. H., Kim, M. J. and Kwon, Y. S. "Microlens for Efficient Coupling between LED and Optical Fiber," IEEE Photonics Technol. Lett., Vol. 11, pp. 439-441 (1999).
2. Cho, S. R., Kim, J., Oh, K. S., Yang, S. K. Baek, J. M., Jang, D. H., Kim, T. I. and Jeon, H. "Enhanced Optical Coupling Performance in an InGaAs Photodiode Integrated with Wet-etched Microlens," IEEE Photonics Technol. Lett., Vol. 14, pp. 378-380 (2002).
3. Möller, S. and Forrest, S. R. "Improved Light Out-coupling in Organic Light Emitting Diodes Employed Ordered Microlens Arrays," J. Appl. Phys., Vol. 91, pp. 3324-3327 (2002).
4. Smuk, A. Y. and Lawandy, N. M. "Direct Laser Fabrication of Dense Microlens Arrays in Semiconductor-doped Glass," J. Appl. Phys., Vol. 87, pp. 4026-4030 (2000).
5. Croutxé-Barghorn, C., Soppera, O. and Lougnot, D. J. "Fabrication of Microlenses by Direct Photo-induced Crosslinking Polymerization," Appl. Surf. Sci., Vol. 168, pp. 89-91 (2000).
6. Lee, C. S. and Han, C. H. "A Novel Refractive Silicon Microlens Array Using Bulk Micro-machining Technology," Sensors and Actuators A, Vol. 88, pp. 87-90 (2001).
7. Danzebrink, R. and Aegerter, M. A. "Deposition of Optical Microlens Arrays by Ink-jet Processes," Thin Solid Films, Vol. 392, pp. 223-225 (2001).
8. Ong, N. S. Koh, Y. H. and Fu, Y. Q. "Microlens Array Produced Using Hot Embossing Process," Microelectron. Eng., Vol. 60, pp. 365-379 (2002).
9. Lin, C. P., Yang H. and Chao, C. K. "Hexagonal Microlens Array Modeling and Fabrication Using a Thermal Reflow Process," J. Micromech. Microeng., Vol. 13, pp. 1-7 (2003).
10. Kunnavaakkam, M. V., Houlihan, F. M., Schlax, M., Liddle, J. A., Kolodner, P., Nalamasu, O. and Rogers, J. A. "Low-cost, Low-loss Microlens Arrays Fabricated by Soft-lithography Replication Process," Appl. Phys. Lett., Vol. 82, pp. 13 52-1154 (2003).