Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy

Applied Optics

Volumn 37, Issue 10, 1998, Pages 1764-1769

  Hart, Matthew ^a,b   Vass, David G ^a   Begbie, Mark L ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FAST FOURIER TRANSFORMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SCANNING; SPECTROSCOPIC ANALYSIS; SURFACE MEASUREMENT; VISUALIZATION;

FAST SURFACE PROFILING; SCANNING WHITE LIGHT INTERFEROMETRY; STYLUS PROFILER;

INTERFEROMETRY;

EID: 0032047788     PISSN: 00036935     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.37.001764     Document Type: Article

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