Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios

Materials Research Society Symposium - Proceedings

Volumn 493, Issue , 1998, Pages 439-444

  Teowee, G ^a   McCarthy, K C ^a   McCarthy, F S ^a   Davis, D G ^a   Dawley, J T ^a   Zelinski, B J J ^a   Uhlmann, D R ^a  

^a Donnelly Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTALLIZATION; PIEZOELECTRICITY; SOL-GELS; THIN FILMS; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

PIEZOELECTRIC COEFFICIENTS;

PIEZOELECTRIC MATERIALS;

EID: 0031672835     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (32)