An electron-spin-resonance study of laser crystallized polycrystalline silicon

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 262-265

  Brendel, K ^a   Nickel, N H ^a   Lips, K ^a   Fuhs, W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); CRYSTALLIZATION; DOPING (ADDITIVES); ELECTRON SPIN RESONANCE SPECTROSCOPY; FERMI LEVEL; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; HALL EFFECT; PARAMAGNETIC RESONANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SECONDARY ION MASS SPECTROMETRY;

CONDUCTION BAND; DOPING CONCENTRATION; SPIN DENSITY; SPIN-LATTICE RELAXATION;

POLYSILICON;

EID: 2942538104     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.02.082     Document Type: Conference Paper

References (12)

1. Christiansen S., Lengsfeld P., Krinke J., Nerding M., Nickel N.H., Strunk H.P. J. Appl. Phys. 86:2001;5348.
2. Jackson W.B., Johnson N.M., Biegelsen D.K. Appl. Phys. Lett. 43:1983;195.
3. Johnson N.M., Biegelson D.K., Moyer M.D. Appl. Phys. Lett. 40:1982;882.
4. Lips K., Kanschat P., Brehme S., Fuhs W. J. Non-Cryst. Solids. 299-302:2002;350.
5. Lengsfeld P., Nickel N.H., Fuhs W. Appl. Phys. Lett. 76:2000;1680.
6. Brendel K., Nickel N.H. Sol. Stat. Phen. 93:2003;167.
7. Quirt J.D., Marko J.R. Phys. Rev. B. 5:1972;1716.
8. Ue H., Maekawa S. Phys. Rev. B. 3:1971;4232.
9. K. Brendel, N.H. Nickel, K. Lips, W. Fuhs, MRS Symp. Proc. 762 (2003) A2.3.1.
10. Brendel K., Nickel N.H., Lips K., Fuhs W. Sol. Stat. Comm. 126:2003;499.
11. Mikoshiba N. Rev. Mod. Phys. 40:1968;833.
12. Fuhs W., Kanschat P., Lips K. J. Vac. Sci. Tech. 18:2000;1792.