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Volumn 762, Issue , 2003, Pages 69-74
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Electron-Spin-Resonance Investigation of Laser Crystallized Polycrystalline Silicon
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CARRIER CONCENTRATION;
CHEMICAL BONDS;
CRYOSTATS;
CRYSTALLIZATION;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY;
ELECTRON SPIN RESONANCE SPECTROSCOPY;
GRAIN BOUNDARIES;
HIGH TEMPERATURE EFFECTS;
LASER BEAM EFFECTS;
PASSIVATION;
POLYCRYSTALLINE MATERIALS;
SINGLE CRYSTALS;
VACUUM;
X RAY SPECTROMETERS;
CONDUCTION BANDS;
GAS FLOW CRYOSTAT;
POLYSILICON;
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EID: 1642439005
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-762-a2.3 Document Type: Conference Paper |
Times cited : (2)
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References (13)
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