Scanning laser ultrasonics experiments for in situ nondestructive analysis of integrated circuits

IEEE Transactions on Device and Materials Reliability

Volumn 5, Issue 3, 2005, Pages 564-570

  Andriamonje, Grégory ^b   Pouget, Vincent ^a,b   Ousten, Yves ^a,b   Lewis, Dean ^b   Plano, Bernard ^b   Danto, Yves ^b  

^a IEEE

^b UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Acoustics; Integrated circuit reliability; Ultrafast optics

Indexed keywords

INTEGRATED CIRCUIT RELIABILITY; OPTICAL NONDESTRUCTIVE TECHNIQUE; SCANNING EXPERIMENTS; ULTRAFAST OPTICS;

ACOUSTICS; MICROELECTRONICS; NONDESTRUCTIVE EXAMINATION; RELIABILITY; SCANNING; ULTRASHORT PULSES; VLSI CIRCUITS;

ULTRASONICS;

EID: 29344466237     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2005.853576     Document Type: Article

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