A study on the growth and piezoelectric characteristics of ZnO thin film using a RF magnetron sputtering method

Journal of the Korean Physical Society

Volumn 47, Issue SUPPL. 3, 2005, Pages

  Kang, Seong Jun ^a   Choi, Joon Young ^b   Chang, Dong Hoon ^b   Yoon, Yung Sup ^b  

^a Chonnam National University   (South Korea)

^b Inha University   (South Korea)

Author keywords

Piezoelectric; Piezoelectric constant; Pneumatic loading method; Resonator; ZnO

Indexed keywords

EID: 29344456007     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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