Passive humidity monitoring system for in-situ remote wireless testing of micropackages

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 335-340

  Harpster, T ^a   Hauvespre, S ^a   Dokmeci, M ^a   Stark, B ^a   Vosoughi, A ^a   Najafi, K ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRONIC MEDICAL EQUIPMENT; ELECTRONICS PACKAGING; HUMIDITY CONTROL; IMPLANTS (SURGICAL); LIVING SYSTEMS STUDIES; NATURAL FREQUENCIES; SENSORS;

HUMIDITY MONITORING SYSTEMS (HMS); HUMIDITY SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033707428     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)