In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 1, 2006, Pages 126-132

  Jindal, A K ^a   Prengler, A J ^a   Overzet, L J ^a   Goeckner, M J ^a  

^a UNIVERSITY OF TEXAS AT DALLAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA CHEMISTRY; PULSED MODE OPERATION; STRETCHING VIBRATIONS;

CHEMICAL BONDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY;

PLASMAS;

EID: 29344446409     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2141618     Document Type: Article

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