Fourier-transform infrared measurements of CHF3/O2 discharges in an electron cyclotron resonance reactor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2586-2592

  Goeckner, M J ^a,c   Goeckner, N A ^b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b WESTERN ILLINOIS UNIVERSITY   (United States)

^c VARIAN MEDICAL SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033471046     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582000     Document Type: Article

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