Enthalpies of formation and reaction for primary reactions of methyl- and methylmethoxysilanes from density functional theory

Plasma Processes and Polymers

Volumn 2, Issue 9, 2005, Pages 669-678

  Casserly, Thomas B ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

Bond dissociation energies; DFT; Enthalpies of formation; Methylmethoxysilanes; Methylsilanes

Indexed keywords

BINDING ENERGY; BOND STRENGTH (CHEMICAL); CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DISSOCIATION; ENTHALPY; FREE RADICAL REACTIONS; MOLECULAR VIBRATIONS; PROBABILITY DENSITY FUNCTION; THERMODYNAMICS;

BOND DISSOCIATION ENERGIES; DENSITY FUNCTIONAL THEORY (DFT); ENTHALPIES OF FORMATION; METHYLMETHOXYSILANES; METHYLSILANES;

POLYSILANES;

EID: 29244473585     PISSN: 16128850     EISSN: None     Source Type: Journal    
DOI: 10.1002/ppap.200500054     Document Type: Article

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