Demonstration of low-cost Si-based tunable long-wavelength resonant-cavity-enhanced photodetectors

Applied Physics Letters

Volumn 86, Issue 3, 2005, Pages 1-3

  Mao, R W ^a   Zuo, Y H ^a   Li, C B ^a   Cheng, B W ^a   Teng, X G ^a   Luo, L P ^a   Yu, J Z ^a   Wang, Q M ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; CHEMICAL MECHANICAL POLISHING; GELS; HETEROJUNCTIONS; QUANTUM EFFICIENCY; SILICATES; SILICON; SUBSTRATES;

BRAGG REFLECTORS; RESONANT-CAVITY-ENHANCED (RCE) PHOTODETECTORS; SILICATE GEL; SILICON SUBSTRATES;

PHOTODETECTORS;

EID: 17044390348     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1852712     Document Type: Article

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