3-D surface profilometry for both static and dynamic nano-scale full field characterization of AFM micro cantilever beams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-12

  Chen, Laing Chia ^a   Fan, Kuang Chao ^b   Lin, Chi Duen ^b   Chang, Calvin C ^c   Kao, Ching Fen ^c   Chou, Jung Tsung ^c  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

AFM cantilever beams; Dynamic profilometry; Micro electromechanical systems (MEMS); Optical interferometry; Stroboscopic interferometry

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROELECTROMECHANICAL DEVICES; PROFILOMETRY; RESONANCE; VIBRATIONS (MECHANICAL);

AFM CANTILEVER BEAMS; DYNAMIC PROFILOMETRY; OPTICAL INTERFEROMETRY; STROBOSCOPIC INTERFEROMETRY;

CANTILEVER BEAMS;

EID: 29244433563     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.614683     Document Type: Conference Paper

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