Design of a machine for the universal non-contact measurement of large free-form optics with 30 nm uncertainty

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5869, Issue , 2005, Pages 1-12

  Henselmans, Rens ^a   Rosielle, Nick ^a   Steinbuch, Maarten ^a   Saunders, Ian ^b   Bergmans, Rob ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TNO   (Netherlands)

^c NMi Van Swinden Laboratorium   (Netherlands)

Author keywords

Aspherical; Free form; Large; Machine; Measurement; Metrology; Non contact; Optics; Probe; Universal

Indexed keywords

ESTIMATION; MACHINE DESIGN; MEASUREMENTS;

ASPHERICAL; FREE-FORM; NON-CONTACT;

OPTICS;

EID: 29144485372     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.613919     Document Type: Conference Paper

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