Polishing robot based on FJP with in-situ monitoring system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5180, Issue , 2003, Pages 101-106

  Van Brug, Hedser ^a   Dorrepaal, Michiel ^a   Saunders, Ian ^a  

^a TNO   (Netherlands)

Author keywords

Corrective polishing; Optical fabrication; Roughness; Testing

Indexed keywords

MONITORING; POLISHING MACHINES; REMOVAL; ROBOT APPLICATIONS; SURFACE ROUGHNESS;

FLUID JET POLISHING TECHNIQUE; IN-SITU MONITORING SYSTEM; OPTICAL FABRICATION; POLISHING ROBOT;

POLISHING;

EID: 1842556544     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. O.W. Faehnle, H. van Brug, H.J. Frankena, "Fluid Jet Polishing of optical surfaces," Applied Optics 37 (28), 1998, pp.6771-6773.
2. R.M. van der Bijl, O.W. Faehnle, H. van Brug, "Subsurface damage measurements as tool for process monitoring," 14th annual meeting ASPE, 20, pp.606 - 609.
3. R.M. van der Bijl, H. van Brug, O.W. Faehnle, J.J.M. Braat, "Applicability of iTIRM for roughness reduction monitoring," SPIE annual meeting 2001, in SPIE proc. 4451, pp.340 - 344.
4. H. van Brug, M. Groeneveld, S.M. Booij, J.J.M. Braat, "In-process measurements of material removal influid jet polishing," SPIE annual meeting 2002, in SPIE proc. 4778, pp.243 - 250.
5. H. van Brug, "Temporal phase unwrapping and its application in shearography systems," Applied Optics 37, 1998, pp.6701 - 6706.