SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 37, Issue 12, 2005, Pages 1082-1091

Chemical stability of TiN, TiAlN and AlN layers in aggressive so 2 environments

(5) Marco, J F a Gancedo, J R a Auger, M A b Sanchez O c Albella, J M c

a INSTITUTO DE QUÍMICA FÍSICA ROCASOLANO (Spain)

b DEPARTMENT OF PHYSICAL METALLURGY (Spain)

c INSTITUTO DE CIENCIA DE MATERIALES DE MADRID (Spain)

Author keywords

AlN coatings; Corrosion; SO2 polluted atmospheres; TiAlN coatings; TiN coatings; XPS

Indexed keywords

ALUMINUM NITRIDE; CHEMICAL REACTIONS; COATING TECHNIQUES; CORROSION; DEGRADATION; MAGNETRON SPUTTERING; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALN COATINGS; SO2-POLLUTED ATMOSPHERE; TIALN COATINGS; TIN COATINGS;

TITANIUM NITRIDE;

EID: 29144438045 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.2083 Document Type: Article

Times cited : (61)

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