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Volumn 37, Issue 12, 2005, Pages 1082-1091
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Chemical stability of TiN, TiAlN and AlN layers in aggressive so 2 environments
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Author keywords
AlN coatings; Corrosion; SO2 polluted atmospheres; TiAlN coatings; TiN coatings; XPS
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Indexed keywords
ALUMINUM NITRIDE;
CHEMICAL REACTIONS;
COATING TECHNIQUES;
CORROSION;
DEGRADATION;
MAGNETRON SPUTTERING;
SILICON WAFERS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ALN COATINGS;
SO2-POLLUTED ATMOSPHERE;
TIALN COATINGS;
TIN COATINGS;
TITANIUM NITRIDE;
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EID: 29144438045
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.2083 Document Type: Article |
Times cited : (61)
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References (30)
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