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Volumn 37, Issue 12, 2005, Pages 1082-1091

Chemical stability of TiN, TiAlN and AlN layers in aggressive so 2 environments

Author keywords

AlN coatings; Corrosion; SO2 polluted atmospheres; TiAlN coatings; TiN coatings; XPS

Indexed keywords

ALUMINUM NITRIDE; CHEMICAL REACTIONS; COATING TECHNIQUES; CORROSION; DEGRADATION; MAGNETRON SPUTTERING; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 29144438045     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.2083     Document Type: Article
Times cited : (61)

References (30)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.