Compositional effects on the crystallization kinetics of nickel titanium thin films

Journal of Materials Research

Volumn 20, Issue 7, 2005, Pages 1728-1734

  Ni, Hai ^a   Lee, Hoo Jeong ^a   Ramirez, Ainissa G ^a  

^a Yale University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; NUCLEATION; PHASE TRANSITIONS; REACTION KINETICS; SHAPE MEMORY EFFECT; SILICON NITRIDE; SPUTTER DEPOSITION; STOICHIOMETRY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLIZATION KINETICS; JOHNSON-MEHL-AVRAMI-KOLMOGOROV ANALYSIS; NICKEL TITANIUM THIN FILMS; POLYMORPHIC CRYSTALLIZATION;

NICKEL ALLOYS;

EID: 29044446313     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0215     Document Type: Article

References (26)

1. M. Avrami: Kinetics of phase change. I: General theory. J. Chem. Phys. 7, 1103 (1939).
2. M. Avrami: Kinetics of phase change. II: Transformation-time relationships for random distribution of nuclei. J. Chem. Phys. 8, 212 (1940).
3. M. Avrami: Kinetics of phase change. III: Granulation, phase change, and microstructure. J. Chem. Phys. 9, 177 (1941).
4. W.A. Johnson and R.F. Mehl: Reaction kinetics in processes of nucleation and growth. Am. Inst. Min. Metal. Pet. Eng. 135, 416 (1939).
5. A.N. Kolmogorov: On the statistical theory of metal crystallization Izv. Akad. Nauk SSSR 3, 355 (1937), in Russian.
6. 0.5 films studied by means of in situ x-ray diffraction and in-situ transmission electron microscopy. Philos. Mag. A 79, 2617 (1999).
7. M.G. Scott: Crystallization, in Amorphous Metallic Alloys, edited F.E. Luborsky (Butterworths, London, U.K., 1983), p. 144.
8. P. Germain, K. Zellama, S. Squelard, J.C. Bourgoin, and A. Gheorghiu: Crystallization in amorphous germanium. J. Appl. Phys. 50, 6986 (1979).
9. D. Turnbull: Kinetics of solidification of supercooled liquid mercury droplets. J. Chem. Phys. 20, 411 (1952).
10. M. Libera and M. Chen: Time-resolved reflection and transmission studies of amorphous Ge-Te thin-film crystallization. J. Appl. Phys. 73, 2272 (1993).
11. W.L. Bernard, H. Kahn, A.H. Heuer, and M.A. Huff: Thin-film shape-memory alloy actuated micropumps. J. Microelectromech. Syst. 7, 245 (1998).
12. R.H. Wolf and A.H. Heuer: TiNi (shape memory) films on silicon for MEMS applications. J. Microelectromech. Syst. 4, 206 (1995).
13. J.J. Kim, P. Moine, and D.A. Stevenson: Crystallization behavior of amorphous NiTi alloys prepared by sputter deposition. Scripta Metall. 20, 243 (1986).
14. J.D. Busch, A.D. Johnson, C.H. Lee, and D.A. Stevenson: Shape memory properties in Ni-Ti sputter-deposited film. J. Appl. Phys. 68, 6224 (1990).
15. S. Takabayshi, K. Tanino, and K. Kitagawa: Heat treatment effect on transformation properties of TiNi shape memory alloy film. Mater. Sci. Res. Int. 3, 220 (1997).
16. T. Lehnert, S. Crevoiserat, and R. Gotthardt: Transformation properties and microstructure of sputter-deposited Ni-Ti shape memory alloy films. J. Mater. Sci. 37, 1523 (2002).
17. F.J. Gil, J.M. Manero, and J.A. Planell: Effects of grain size on the martensitic transformation in NiTi alloy. J. Mater. Sci. 30, 2526 (1995).
18. C.L. Shih, B.K. Lai, H. Kahn, S.M. Phillips, and A.H. Heuer: A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS. J. Microelectromech. Syst. 10, 69 (2001).
19. 4 MEMS membranes. Sens. Actuators A: Phys. 119, 553 (2005).
20. H-J. Lee and A.G. Ramirez: Crystallization and phase transformations in amorphous NiTi thin films for microelectromechanical systems. Appl. Phys. Lett. 85, 1146 (2004).
21. D.T. Wu: Nucleation theory. Solid State Physics 50, 37 (1997).
22. J.W. Martin, R.D. Doherty, and B. Cantor: Stability of Microstructure in Metallic Systems (Cambridge University Press, New York, NY, 1997).
23. W.J. Moberly, J.D. Busch, A.D. Johnson, and M.H. Berkson: In situ HVEM of crystallization of amorphous TiNi thin films, in Phase Transformation Kinetics in Thin Films, edited by M. Chen, M.O. Thompson, R.B. Schwarz, and M. Libera (Mater. Res. Soc. Symp. Proc. 230, Pittsburgh, PA 1992), pp. 85-90.
24. D.B. Williams: Practical Analytical Electron Microscopy in Materials Science (Electron Optics Publishing Group, Mahwah, NJ, 1984).
25. J.W. Cahn: The time cone method for nucleation and growth kinetics on a fininte domain, in Thermodynamics and Kinetics of Phase Transformations, edited by J.S. Im, B. Park, A.L. Greer, and G.B. Stephenson (Mater. Res. Soc. Symp. Proc. 398, Pittsburgh, PA, 1996), p. 425.
26. J.W. Christian: The Theory of Transformation in Metals and Alloys, 2nd ed. (Pergamon, New York, NY, 1975).