Deep UV lithography for pillar type nanophotonic crystal

International Journal of Nanoscience

Volumn 4, Issue 4, 2005, Pages 559-566

  Teo, Selin H G ^a   Liu, A Q ^a   Sia, G L ^a   Lu, C ^a   Singh, J ^b   Yu, M B ^b   Sun, H Q ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Deep UV lithography; Nanofabrication; Photonic crystal

Indexed keywords

ANTIREFLECTION COATINGS; DATA ACQUISITION; LITHOGRAPHY; PHASE SHIFT; ULTRAVIOLET RADIATION;

DEEP UV LITHOGRAPHY; NANOFIBRICATION; PHOTONIC CRYSTAL;

NANOSTRUCTURED MATERIALS;

EID: 28844501428     PISSN: 0219581X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0219581X05003577     Document Type: Article

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