Nanofabrication of advanced waveguide structures incorporating a visible photonic band gap

Journal of Micromechanics and Microengineering

Volumn 8, Issue 2, 1998, Pages 172-176

  Charlton, M D B ^a   Parker, G J ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; ETCHING; LIGHT POLARIZATION; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; TWO DIMENSIONAL; WAVEGUIDES;

PHOTONIC BAND GAP; SEMICONDUCTOR WAVEGUIDES;

NANOTECHNOLOGY;

EID: 0032089670     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/2/033     Document Type: Article

References (8)

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4. Gruning U, Lehmann V, Ottow S and Busch K 1995 Appl. Phys. Lett. 68 747
5. Charlton M D B and Parker GJ 1997 J. Micromech. Microeng. 7 155
6. Charlton MDB, Parker G J and Roberts SW 1997 Mater. Sci. Eng. B 49 155
7. Russell P St J 1992 Physics World August 37
8. Raguin D H and Morris GM 1997 Laser Focus World April 113