Effect of air-pressure on room temperature hydrogen sensing characteristics of nanocrystalline doped tin oxide MEMS-based sensor

Journal of Nanoscience and Nanotechnology

Volumn 5, Issue 11, 2005, Pages 1864-1874

  Shukla, Satyajit ^a   Ludwig, Lawrence ^b   Cho, Hyoung J ^a   Duarte, Julian ^a,c   Seal, Sudipta ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b KENNEDY SPACE CENTER   (United States)

^c NATIONAL SCIENCE FOUNDATION   (United States)

Author keywords

Air pressure; Hydrogen; MEMS; Nanocrystalline; Sensor; Tin oxide

Indexed keywords

AIR-PRESSURE; ROOM TEMPERATURE; SENSOR-RESISTANCE;

CRYSTALLINE MATERIALS; HYDROGEN; MICROELECTROMECHANICAL DEVICES; SENSORS; SOL-GELS; THIN FILMS; TIN COMPOUNDS; ULTRAVIOLET RADIATION;

NANOSTRUCTURED MATERIALS;

HYDROGEN; INDIUM; INDIUM OXIDE; ION; NANOMATERIAL; OXYGEN; TIN DERIVATIVE; TIN DIOXIDE;

AIR; ARTICLE; CHEMISTRY; ELECTROCHEMISTRY; ELECTRODE; EQUIPMENT DESIGN; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PRESSURE; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTY; TEMPERATURE; TIME; TRANSDUCER; ULTRAVIOLET RADIATION;

AIR; ELECTROCHEMISTRY; ELECTRODES; EQUIPMENT DESIGN; HYDROGEN; INDIUM; IONS; MATERIALS TESTING; NANOSTRUCTURES; NANOTECHNOLOGY; OXYGEN; PARTIAL PRESSURE; PRESSURE; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTIES; TEMPERATURE; TIME FACTORS; TIN COMPOUNDS; TRANSDUCERS; ULTRAVIOLET RAYS;

EID: 28644435755     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2005.429     Document Type: Article

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