Effect of ion bombardment on stress in thin metal films

Physical Review B - Condensed Matter and Materials Physics

Volumn 68, Issue 21, 2003, Pages

  Mayr, S G ^a,b   Averback, R S ^b  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; GLASS; METAL; NIOBIUM; SILVER; ZIRCONIUM;

ARTICLE; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CALCULATION; COMPUTER SIMULATION; FILM; GEOMETRY; MOLECULAR DYNAMICS; STRESS; THERMODYNAMICS;

EID: 1642452983     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.68.214105     Document Type: Article

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