메뉴 건너뛰기




Volumn 14, Issue 6, 2005, Pages 1343-1352

Theoretical modeling, experiments and optimization of piezoelectric multimorph

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; NATURAL FREQUENCIES; OPTIMIZATION; STRUCTURE (COMPOSITION); SUBSTRATES; ZIRCONIUM ALLOYS;

EID: 28344444933     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/14/6/026     Document Type: Article
Times cited : (38)

References (27)
  • 2
    • 0033682798 scopus 로고    scopus 로고
    • Ferroelectric thin films for micro-sensors and actuators: A review
    • Muralt P 2000 Ferroelectric thin films for micro-sensors and actuators: a review J. Micromech. Microeng. 10 136-46
    • (2000) J. Micromech. Microeng. , vol.10 , Issue.2 , pp. 136-146
    • Muralt, P.1
  • 4
    • 0024870707 scopus 로고
    • Ultrasonic linear motor for a high precision X-Y stage
    • Mori K, Kumagae T and Hirai H 1989 Ultrasonic linear motor for a high precision X-Y stage Proc. IEEE Ultrason. Symp. 1 657-60
    • (1989) Proc. IEEE Ultrason. Symp. , vol.1 , pp. 657-660
    • Mori, K.1    Kumagae, T.2    Hirai, H.3
  • 5
    • 0028747022 scopus 로고
    • Image resolution improvement by swing CCD array imager in two dimensions and its signal processing
    • Li P and Wen Y 1994 Image resolution improvement by swing CCD array imager in two dimensions and its signal processing Proc. SPIE 2308 915-20 (part 2)
    • (1994) Proc. SPIE , vol.2308 , pp. 915-920
    • Li, P.1    Wen, Y.2
  • 7
    • 0032001294 scopus 로고    scopus 로고
    • A smart material microamplification mechanism fabricated using LIGA
    • Pokines B J and Garcia E 1998 A smart material microamplification mechanism fabricated using LIGA Smart Mater. Struct. 7 105-12
    • (1998) Smart Mater. Struct. , vol.7 , Issue.1 , pp. 105-112
    • Pokines, B.J.1    Garcia, E.2
  • 9
    • 0025760945 scopus 로고
    • Piezoelectric modal sensor/actuator pairs for critical active damping vibration control
    • Lee C K, Chiang W W and O'Sullivan T C 1991 Piezoelectric modal sensor/actuator pairs for critical active damping vibration control J. Acoust. Soc. Am. 90 374-84
    • (1991) J. Acoust. Soc. Am. , vol.90 , Issue.1 , pp. 374-384
    • Lee, C.K.1    Chiang, W.W.2    O'Sullivan, T.C.3
  • 10
    • 0022128698 scopus 로고
    • Distributed piezoelectric-polymer active vibration control of a cantilever beam
    • Bailey T and Hubbard J E 1985 Distributed piezoelectric-polymer active vibration control of a cantilever beam J. Guid. Control 8 605-11
    • (1985) J. Guid. Control , vol.8 , pp. 605-611
    • Bailey, T.1    Hubbard, J.E.2
  • 11
    • 0023437632 scopus 로고
    • Use of piezoelectric actuators as elements of intelligent structures
    • Crawley E F and de Luis J 1987 Use of piezoelectric actuators as elements of intelligent structures AIAA J. 25 1373-85
    • (1987) AIAA J. , vol.25 , Issue.10 , pp. 1373-1385
    • Crawley, E.F.1    De Luis, J.2
  • 12
    • 0029389776 scopus 로고
    • Acoustic control using self-sensing actuator
    • Ko B and Tongue B H 1995 Acoustic control using self-sensing actuator J. Sound Vib. 187 145-65
    • (1995) J. Sound Vib. , vol.187 , Issue.1 , pp. 145-165
    • Ko, B.1    Tongue, B.H.2
  • 13
    • 0032671067 scopus 로고    scopus 로고
    • Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation
    • Yao K, Zhu W, Uchino K, Zhang Z and Lim L C 1999 Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation IEEE Trans. Ultrason. Ferroelectr. Freq. Control 46 1020-7
    • (1999) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.46 , Issue.4 , pp. 1020-1027
    • Yao, K.1    Zhu, W.2    Uchino, K.3    Zhang, Z.4    Lim, L.C.5
  • 15
    • 0032014718 scopus 로고    scopus 로고
    • Electromechanical analysis of a symmetric piezoelectric/elastic laminate structure: Theory and experiment
    • Rogacheva N N, Chou C C and Chang S H 1998 Electromechanical analysis of a symmetric piezoelectric/elastic laminate structure: theory and experiment IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45 285-94
    • (1998) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.45 , Issue.2 , pp. 285-294
    • Rogacheva, N.N.1    Chou, C.C.2    Chang, S.H.3
  • 16
    • 0031235285 scopus 로고    scopus 로고
    • Modeling and optimal design of piezoelectric cantilever microactuators
    • De Voe D L and Pisano A P 1997 Modeling and optimal design of piezoelectric cantilever microactuators J. Microelectr. Syst. 6 266-70
    • (1997) J. Microelectr. Syst. , vol.6 , Issue.3 , pp. 266-270
    • De Voe, D.L.1    Pisano, A.P.2
  • 17
    • 0033338026 scopus 로고    scopus 로고
    • Working equations for piezoelectric actuators and sensors
    • Weinberg M S 1999 Working equations for piezoelectric actuators and sensors J. Microelectr. Syst. 8 529-33
    • (1999) J. Microelectr. Syst. , vol.8 , Issue.4 , pp. 529-533
    • Weinberg, M.S.1
  • 18
    • 0035418263 scopus 로고    scopus 로고
    • On the correction of the Bernoulli-Euler beam theory for smart piezoelectric beams
    • Krommer M 2001 On the correction of the Bernoulli-Euler beam theory for smart piezoelectric beams Smart Mater. Struct. 10 668-80
    • (2001) Smart Mater. Struct. , vol.10 , Issue.4 , pp. 668-680
    • Krommer, M.1
  • 19
    • 0037457757 scopus 로고    scopus 로고
    • Analysis of a piezoelectric multimorph in extensional and flexural motions
    • Ha S K and Kim Y H 2002 Analysis of a piezoelectric multimorph in extensional and flexural motions J. Sound Vib. 253 1001-14
    • (2002) J. Sound Vib. , vol.253 , Issue.5 , pp. 1001-1014
    • Ha, S.K.1    Kim, Y.H.2
  • 20
    • 0742321642 scopus 로고    scopus 로고
    • Electromechanical coupling correction for piezoelectric layered beams
    • Tadmor E B and K'osa G 2003 Electromechanical coupling correction for piezoelectric layered beams J. Microelectromech. Syst. 12 899-906
    • (2003) J. Microelectromech. Syst. , vol.12 , Issue.6 , pp. 899-906
    • Tadmor, E.B.1    K'Osa, G.2
  • 21
    • 0032631354 scopus 로고    scopus 로고
    • Electromechanical behavior of PZT-brass unimorphs
    • Li X, Shih W Y, Aksay I A and Shih W-H 1999 Electromechanical behavior of PZT-brass unimorphs J. Am. Ceram. Soc. 82 1733-40
    • (1999) J. Am. Ceram. Soc. , vol.82 , Issue.7 , pp. 1733-1740
    • Li, X.1    Shih, W.Y.2    Aksay, I.A.3    Shih, W.-H.4
  • 23
    • 0031211577 scopus 로고    scopus 로고
    • Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals
    • Park S E and Shrout T R 1997 Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals J. Appl. Phys. 82 1804-11
    • (1997) J. Appl. Phys. , vol.82 , Issue.4 , pp. 1804-1811
    • Park, S.E.1    Shrout, T.R.2
  • 24
    • 0343684445 scopus 로고
    • Optimal location of distributed sensor/actuator
    • Ko B, Tongue B H and Packard A 1994 Optimal location of distributed sensor/actuator Shock Vib. 1 357-74
    • (1994) Shock Vib. , vol.1 , pp. 357-374
    • Ko, B.1    Tongue, B.H.2    Packard, A.3
  • 27
    • 0026171869 scopus 로고
    • The constituent equations of piezoelectric bimorphs
    • Smits J G, Dalke S L and Cooney T K 1991 The constituent equations of piezoelectric bimorphs Sensors Actuators 28 41-61
    • (1991) Sensors Actuators , vol.28 , Issue.1 , pp. 41-61
    • Smits, J.G.1    Dalke, S.L.2    Cooney, T.K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.