Numerical investigation of CO2 laser heating for annealing Ni/Ti multilayer thin films

Smart Materials and Structures

Volumn 14, Issue 6, 2005, Pages 1320-1324

  He, Q ^a,b   Huang, W M ^a   Gao, X Y ^a   Hong, M H ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; FURNACES; LASER APPLICATIONS; NICKEL ALLOYS; SHAPE MEMORY EFFECT; SILICON; SUBSTRATES; THIN FILMS; TITANIUM ALLOYS;

COMPOSITION CONTROL; FURNACE ANNEALING; IC/MEMS PROCESSING TECHNIQUES; NI/TI MULTILAYER THIN FILMS;

CARBON DIOXIDE;

EID: 28344435784     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/14/6/024     Document Type: Article

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