CO 2 laser annealing of sputtering deposited NiTi shape memory thin films

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 950-956

  He, Q ^a,b   Hong, M H ^a   Huang, W M ^b   Chong, T C ^a   Fu, Y Q ^b   Du, H J ^b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MICROGRIPPERS; MONOCLINIC CRYSTALS; PIEZOELECTRIC THIN FILMS;

ACTUATORS; AMORPHOUS FILMS; ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; MARTENSITE; MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; OPTICAL MICROSCOPY; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SPUTTERING; THERMAL CYCLING; X RAY DIFFRACTION ANALYSIS;

THIN FILMS;

EID: 3142771837     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/016     Document Type: Article

References (15)

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