Smoothing of ZnO films by gas cluster ion beam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 241, Issue 1-4, 2005, Pages 630-635

  Chen, H ^a   Liu, S W ^a   Wang, X M ^a   Iliev, M N ^a   Chen, C L ^a   Yu, X K ^a   Liu, J R ^a   Ma, K ^a   Chu, W K ^a  

^a University of Houston   (United States)

Author keywords

Gas cluster ion beam; Planarization; ZnO

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BEAMS; ION BOMBARDMENT; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES; THIN FILMS;

GAS CLUSTER ION BEAMS; PLANARIZATION; ZNO;

ZINC OXIDE;

EID: 28144438891     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.100     Document Type: Conference Paper

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