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IEEE Radio Frequency Integrated Circuits Symposium, RFIC, Digest of Technical Papers

Volumn , Issue , 2003, Pages 611-614

CMOS-compatible RF-MEMS tunable capacitors

(2) Oz, Altug a Fedder, Gary K b

a CARNEGIE MELLON UNIVERSITY (United States)

b CARNEGIE MELLON UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; SPURIOUS SIGNAL NOISE;

TUNABLE CAPACITORS;

CAPACITORS;

EID: 0041659339 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (10)

References (7)

1
- 0036315573
- Differential multi-finger MEMS tunable capacitors for RF integrated circuits
- G. V. Ionis, A. Dec, K. Suyama, "Differential multi-finger MEMS tunable capacitors for RF integrated circuits," 2002 IEEE MTT-S Int. Microwave Symposium Digest, Volume: 1, 2002, Page(s): 345 -348.
- (2002) 2002 IEEE MTT-S Int. Microwave Symposium Digest , vol.1 , pp. 345-348
- Ionis, G.V.¹ Dec, A.² Suyama, K.³

2
- 0030682866
- A micromachine-based RF low-noise voltage-controlled oscillator
- Proceedings of the IEEE 1997
- D. J. Young, B. E. Böser, "A Micromachine-Based RF Low-Noise Voltage-Controlled Oscillator", Custom Integrated Circuits Conference, 1997, Proceedings of the IEEE 1997, Page(s): 431-434.
- (1997) Custom Integrated Circuits Conference , pp. 431-434
- Young, D.J.¹ Böser, B.E.²

3
- 0037251194
- Variable MEMS capacitors implemented into RF filter systems
- Jan
- R. L. Berwick III, P. A. Stupar, J. DeNatale, R. Anderson, R. Erladson, "Variable MEMS capacitors implemented into RF filter systems," IEEE Transactions on Microwave Theory and Techniques, Volume: 51 Issue: 1, Jan 2003, Page(s): 315-319.
- (2003) IEEE Transactions on Microwave Theory and Techniques , vol.51 , Issue.1 , pp. 315-319
- Berwick R.L. III¹ Stupar, P.A.² Denatale, J.³ Anderson, R.⁴ Erladson, R.⁵

4
- 0000548549
- MEMS-based variable capacitor for millimeter-wave applications
- Z. Feng, H. Zhang, W. Zhang, B. Su, K. Gupta, V. Bright, and Y. Lee, "MEMS-based variable capacitor for millimeter-wave applications," Solid-State Sensors and Actuators Workshop Tech. Dig., 2000, pp. 255-258.
- (2000) Solid-State Sensors and Actuators Workshop Tech. Dig. , pp. 255-258
- Feng, Z.¹ Zhang, H.² Zhang, W.³ Su, B.⁴ Gupta, K.⁵ Bright, V.⁶ Lee, Y.⁷

5
- 0030282352
- Laminated high-aspect-ratio microstructures in a conventional CMOS process
- March
- G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, and L. R. Carley, "Laminated High-Aspect-Ratio Microstructures In A Conventional CMOS Process," Sensors & Actuators, vol. A57, no. 2, pp. 103-110, March1997.
- (1997) Sensors & Actuators , vol.A57 , Issue.2 , pp. 103-110
- Fedder, G.K.¹ Santhanam, S.² Reed, M.L.³ Eagle, S.C.⁴ Guillou, D.F.⁵ Lu, M.S.-C.⁶ Carley, L.R.⁷

6
- 0043090359
- CMOS electro-thermal lateral micromovers for actuation and self-assembly
- June
- A. Oz, G. K. Fedder, "CMOS Electro-thermal Lateral Micromovers for Actuation and Self-Assembly", Proc. of the SEM Annual Conference on Experimental and Applied Mechanics, June 2003.
- (2003) Proc. of the SEM Annual Conference on Experimental and Applied Mechanics
- Oz, A.¹ Fedder, G.K.²

7
- 77957589770
- RF CMOS-MEMS capacitor having large tuning range
- June 8-12
- A. Oz, G. K. Fedder, "RF CMOS-MEMS Capacitor having Large Tuning Range," 2003 IEEE Transducers, June 8-12.
- (2003) 2003 IEEE Transducers
- Oz, A.¹ Fedder, G.K.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.