A low-temperature and low-cost method to produce high-quality epitaxial anatase TiO2 thin films

Journal of Materials Research

Volumn 20, Issue 2, 2005, Pages 292-294

  Zhang, Zhaoming ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; FILM GROWTH; HYDROTHERMAL SYNTHESIS; LOW TEMPERATURE EFFECTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EPITAXIAL ANATASE THIN FILMS; HYDROTHERMAL METHOD; LATTICE-MATCHED SUBSTRATES;

TITANIUM OXIDES;

EID: 28044452444     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0036     Document Type: Article

References (23)

1. K.I. Hadjiivanov and D.G. Klissurski: Surface chemistry of titania (anatase) and titania-supported catalysts. Chem. Soc. Rev. 25, 61 (1996).
2. L. Kavan, M. Grätzel, S.E. Gilbert, C. Klemenz, and H.J. Scheel: Electrochemical and photoelectrochemical investigation of single-crystal anatase. J. Am. Chem. Soc. 118, 6716 (1996).
3. 2 anatase and futile thin films. Appl. Surf. Sci. 200, 21 (2002).
4. 2 films. Nature 353, 737 (1991).
5. A. Hagfeldt and M. Gratzel: Light-induced redox reactions in nanocrystalline systems. Chem. Rev. 95, 49 (1995).
6. 2 (anatase). J. Electrochem. Soc. 142, L142 (1995).
7. Y. Matsumoto, M. Murakami, T. Shono, T. Hasegawa, T. Fukumura, M. Kawasaki, P. Ahmet, T. Chikyow, S. Koshihara, and H. Koinuma: Room-temperature ferromagnetism in transparent transition metal-doped titanium dioxide. Science 291, 854 (2001).
8. 2 thin films produced by lattice deformation. Jpn. J. Appl. Phys. 36, 7358 (1997).
9. 3 substrate by laser molecular-beam epitaxy. Appl. Phys. Lett. 78, 2664 (2001).
10. 2 thin films. Appl. Surf. Sci. 185, 47 (2001).
11. 2 films. J. Vac. Sci. Technol. A 11, 2419 (1993).
12. 3 substrates. J. Cryst. Growth 252, 333 (2003).
13. 3 (100) by pulsed laser ablation. J. Appl. Phys. 92, 2518 (2002).
14. B-S. Jeong, J.D. Budai, and D.P. Norton: Epitaxial stabilization of single crystal anatase films via reactive sputter deposition. Thin Solid Films 422, 166 (2002).
15. B-S. Jeong, D.P. Norton, J.D. Budai, and G.E. Jellison: Epitaxial growth of anatase by reactive sputter deposition using water vapor as the oxidant. Thin Solid Films 446, 18 (2004).
16. F. Imai, K. Kunimori, T. Manabe, T. Kumagai, and H. Nozoye: Epitaxial growth of titanium dioxide thin films on MgO (100) single-crystal substrates by reactive deposition methods. Thin Solid Films 310, 184 (1997).
17. 2 films in a hydroxyl-free atomic layer deposition process. J. Cryst. Growth 235, 293 (2002).
18. 2-1ow temperature epitaxy of mille and anatase. J. Electrochem. Soc. 147, 3319 (2000).
19. 2 nanoparticles in thin films. Chem. Mater. 10, 2419 (1998).
20. H.W. Nesbitt, G.M. Bancroft, W.S. Fyfe, S.N. Karkhanis, A. Nishijima, and S. Shin: Thermodynamic stability and kinetics of perovskite dissolution. Nature 289, 358 (1981).
21. T. Kastrissios, M. Stephenson, P.S. Turner, and T.J. White: Hydrothermal dissolution of perovskite: Implications for synroc formulation. J. Am. Ceram. Soc. 70, C-144 (1987).
22. J.K. Burdett, T. Hughbanks, G.J. Miller, J.W. Richardson, and J.V. Smith: Structural-electronic relationships in inorganic solids: Powder neutron diffraction studies of the mille and anatase polymorphs of titanium dioxide at 15 and 295 K. J. Am. Chem. Soc. 109, 3639 (1987).
23. 3) at hydrothermal temperatures, in Aust Ceram 2002 Proc., edited by I.M. Low and D.N. Phillips (Aust. Ceram. Soc., Perth, Australia, 2002), p. 55.