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Volumn , Issue , 2005, Pages 1035-1038
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Kinetics of hydrogenation and interaction with oxygen in crystalline silicon
a b c c d d
c
TNO
(Netherlands)
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTALLINE MATERIALS;
DIFFUSION;
OXYGEN;
POLYSILICON;
PRECIPITATION (CHEMICAL);
MULTI-CRYSTALLINE MATERIALS;
OXYGEN CONCENTRATIONS;
VACANCY CONCENTRATION;
HYDROGENATION;
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EID: 27944503611
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
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References (10)
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