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Volumn 3, Issue , 2004, Pages 1245-1248
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Dynamic analysis of a snap-action micromechanism
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Author keywords
Bistable micromechanism; Dynamic switching; MEMS
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Indexed keywords
FABRICATION;
OPTICAL FILTERS;
SWITCHES;
TUNING;
MICRO-SWITCHES;
PIXEL ARRAYS;
SNAP-ACTION MICROMECHANISM;
MICROELECTROMECHANICAL DEVICES;
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EID: 27944450137
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (25)
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References (14)
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