A compact spectrometer based on a micromachined torsional mirror device

Proceedings of IEEE Sensors

Volumn 3, Issue , 2004, Pages 1312-1315

  Kenda, A ^a   Schert, W ^a   Hauser, R ^a   Gruger H ^b   Schenk, H ^b  

^a CTR CARINTHIAN TECH RESEARCH AG   (Austria)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

MEMS; Micro scanning mirror; Micro spectrometer; MOEMS

Indexed keywords

CALIBRATION; DIFFRACTION GRATINGS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; MONOCHROMATORS; SCANNING;

MICRO-SCANNING-MIRRORS; MICRO-SPECTROMETERS; MOEMS; RESONANCE FREQUENCY;

SPECTROMETERS;

EID: 27944437905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. rd Intern. Conf. Micro Opto Mechanical Systems, Mainz (1999), p. 3-10.
2. H. Schenk et al., "Large deflection micromechanical scanning mirrors for linear scans and pattern generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5 (2000), p.715-722.
3. H. Schenk et al., "A new driving principle for micro-mechanical torsional actuators", Micro-Electro-Mechanical System, MEMS-Vol.1, Conf: 1999 Intern. Mechanical Engineering Congress & Exhibition, Nashville (1999), p.333-338.
4. R. Contant, "Micromachined mirrors", Kluwer Academic Publishers Group, Dordrecht (2003), p.79-108.
5. K. U. Roscher et al., "Driver ASIC for synchronized excitation of resonant micro mirrors", MOEMS Display and Imaging Systems, Proc. of SPIE Vol. 4985 (2003).
6. Grüger et al., "Realization of a spectrometer with micromachined scanning grating", Photonics Fabrication Europe, Brügge, Belgium, SPIE vol. 4945A-6 (2002).
7. Grüger et al., "Performance and Applications of a spectrometer with micromachined scanning grating", Integrated Optoelectronics Devices, SPIE, San Jose, CA (2003).