Laser forming of LTCC ceramics for hot-plate gas sensors

Journal of Microelectronics and Electronic Packaging

Volumn 2, Issue 1, 2005, Pages 14-18

  Kita, Jaroslaw ^a   Rettig, Frank ^a   Moos, Ralf ^a   Drüe, Karl Heinz ^b   Thust, Heiko ^b  

^a UNIVERSITY OF BAYREUTH   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Ceramic hot plate; Gas sensor; Low temperature cofired ceramics; LTCC

Indexed keywords

CERAMIC MATERIALS; COST EFFECTIVENESS; ENERGY UTILIZATION; LASER BEAM CUTTING; MICROELECTROMECHANICAL DEVICES; TEMPERATURE DISTRIBUTION;

BEAM WIDTH; CERAMIC HOT-PLATE; LASER FORMING; LOW TEMPERATURE COFIRED CERAMICS;

CHEMICAL SENSORS;

EID: 27844578426     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.4071/1551-4897-2.1.14     Document Type: Article

References (7)

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