Selective growth of horizontally-oriented carbon nanotube bridges on patterned silicon wafers by electroless plating Ni catalysts

Diamond and Related Materials

Volumn 14, Issue 11-12, 2005, Pages 1867-1871

  Lin, Chen Chun ^a   Chen, Po Lin ^a   Lin, Chi Ting ^a   Kuo, Cheng Tzu ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Carbon nanotubes (CNTs); Electroless plating; Microwave plasma chemical vapor deposition (MPCVD); Selective deposition process

Indexed keywords

AMORPHOUS SILICON; AUGER ELECTRON SPECTROSCOPY; CATALYSTS; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTROLESS PLATING; ELECTRONIC EQUIPMENT; NICKEL; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

NITROGEN ATMOSPHERE; SELECTIVE DEPOSITION PROCESS;

NANOTUBES;

EID: 27744588880     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.06.045     Document Type: Conference Paper

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