Material dependence of electronic sputtering induced by MeV-energy heavy ions

Vacuum

Volumn 73, Issue 1, 2004, Pages 79-87

  Ninomiya, S ^a   Imanishi, N ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster emission; Emission energy; Multiply charged ions; Secondary ion; Sputtering; Yield

Indexed keywords

COAGULATION; ELECTRIC CHARGE; ELECTRIC INSULATORS; ELECTRON EMISSION; ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGENATION; POSITIVE IONS; REACTION KINETICS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR MATERIALS; SPUTTERING;

CLUSTER EMISSION; ELECTRONIC SPUTTERING; EMISSION ENERGY; MULTIPLY CHARGED IONS;

HEAVY IONS;

EID: 1142280290     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.026     Document Type: Conference Paper

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