Damage-free and short annealing of Pb(Zr,Ti)O3 thick films directly deposited on stainless steel sheet by aerosol deposition with CO 2 laser radiation

Journal of the American Ceramic Society

Volumn 88, Issue 6, 2005, Pages 1407-1410

  Baba, So ^a   Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; ANNEALING; CARBON DIOXIDE LASERS; DEPOSITION; DIFFUSION; ELECTRIC FURNACES; POLARIZATION; STAINLESS STEEL; THICK FILMS;

AEROSOL DEPOSITION; LASER RADIATION; SURFACE BRILLIANCE; THERMAL HEATING;

LEAD COMPOUNDS;

EID: 27644585149     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2005.00269.x     Document Type: Article

References (19)

1. 3 Thin Films: Integration and Application Issues;" pp. 231-60 in Piezoelectric Materials in Devices, Edited by N. Setter. Ceramic Laboratory, EPFL, Switzerland, 2002.
2. 3 Thick Films Prepared for Microactuators by Aerosol Deposition," Appl. Phys. Lett., 77 [11] 1710-2 (2000).
3. R. Seveno, P. Limousin, D. Averty, J.-L. Chartier, R. Le Bihan, and H. W. Gundel, "Preparation of Multi-Coating PZT Thick Films by Sol-Gel Method onto Stainless Steel Substrates," J. Ear. Cerum. Soc., 20, 2025-8 (2000).
4. Q. Zou, H. E. Ruda, B. G. Yacobi, K. Saegusa, and M. Farrell, "Dielectric Properties of Lead Zirconate Tilanale Thin Films Deposited on Metal Foils," Appl. Phys. Lett., 77 [7] 1038-40 (2000).
5. 3-Coated Stainless Steel Substrate," Appl. Phys. Lett., 81 [25] 4805-7 (2002).
6. 3 Thick Films Formed by Aerosol Deposition Method," J. Cryst. Growth, 235, 415-20 (2002).
7. 3 Thin Films Prepared by Laser Annealing Techniques," Jpn. J. Appl. Phys., 41 [11b] 6679-81 (2002).
8. 2 Laser Annealing," Appl. Phys. Lett., 83 [15] 3156-8 (2003).
9. 3 Sol-Gel Films," Appl. Surf. Sci., 208-209, 378-81 (2003).
10. 2 Laser," Jpn. J. Appl. Phys., 31 [9b] 3037-40 (1992).
11. M. Lebedev and J. Akedo, "Effect of Thickness on the Piezoelectric Properties of Lead Zirconale Tilanate Films Fabricated by Aerosol Deposition Method," Jpn. J. Appl. Phys., 41 [11b] 6669-73 (2002).
12. J. Akedo and M. Lebedev, "Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films," Jpn. J. Appl. Phys., 41 [11b] 6980-4 (2002).
13. 3 Buffer Lavers," Appl. Phys. Lett., 78 [9] 1282-4 (2001).
14. J. Akedo, M. Lebedev, and S. Baba, "Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature- Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma," Jpn. J. Appl. Phys., 42 [9b] 5931-5 (2003).
15. V. Nagarajan, A. Roytburd, A. Stanishevsky, S. Prascrtchoung, T. Zhao, L. Chen, J. Melngailis, O. Auciello, and R. Ramesh, "Dynamics of Ferroelastic Domains in Ferroelectric Thin Films," Nat. Mater., 2, 43-7 (2003).
16. 3) Thick Films Deposited by Aerosol Deposition Method," Jpn. J. Appl. Phys., 38 [9b] 5397-401 (1999).
17. J. Akedo and M. Lebedev, "Aerosol Deposition Method (ADM): A Novel Method of PZT Thick Films Producing for Microactuators," Recent Res. Devil. Mat. Sci., 2, 51-77 (2001).
18. V. Vignal, C. Valot, R. Oltra, M. Verneau, and L. Coudreuse, "Analogy Between the Effects of a Mechanical and Chemical Perturbation on the Conductivity of Passive Films," Corros. Sci., 44, 1477-96 (2002).
19. C. Prakash and O. P. Thakur, "Effects of Samarium Modification on the Structural and Dielectric Properties of PLZT Ceramics," Mater. Lett., 57, 2310-4 (2003).