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Volumn 208-209, Issue 1, 2003, Pages 378-381
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CO 2 laser-induced structure changes in lead zirconate titanate Pb(Zr 0.58 Ti 0.42 )O 3 sol-gel films
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Author keywords
CO 2 laser; Laser treatment; PZT sol gel thin films
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Indexed keywords
ANNEALING;
CARBON DIOXIDE LASERS;
ELECTROMAGNETIC WAVE POLARIZATION;
FERROELECTRIC CERAMICS;
IRRADIATION;
LASER ABLATION;
LEAD COMPOUNDS;
MULTILAYERS;
PEROVSKITE;
PIEZOELECTRIC DEVICES;
SOL-GELS;
SPUTTERING;
SUBSTRATES;
EVAPORATION;
FILM GROWTH;
LASER BEAM EFFECTS;
SILICA;
X RAY ANALYSIS;
DIELECTRIC PERMEABILITY;
LASER POWER DENSITY;
FERROELECTRIC THIN FILMS;
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EID: 0037443240
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)01408-3 Document Type: Conference Paper |
Times cited : (5)
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References (11)
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