Electrostatically driven synthetic microjet arrays as a propulsion method for micro flight : Part II: Microfabrication and initial characterization

Microsystem Technologies

Volumn 11, Issue 12, 2005, Pages 1292-1300

  Parviz, Babak A ^a   Najafi, Khalil ^b   Muller, Michael O ^b   Bernal, Luis P ^b   Washabaugh, Peter D ^b  

^a University of Washington   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AIRCRAFT PROPULSION; ELECTROSTATICS; IMAGING TECHNIQUES; MATHEMATICAL MODELS; RESONANCE; RESONATORS;

HELMHOTZ RESONATORS; HOT-WIRE ANEMOMETRY; MICROJETS; PROPULSION SYSTEMS;

JETS;

EID: 27644554332     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0600-y     Document Type: Article

References (10)

1. Amjadi H, Sessler GM (1997) Charge storage in APCVD silicon nitride. In: Proceedings of the IEEE conference on electrical insulation and dielectric phenomena. Minneapolis pp 64-67
2. Coe DJ et al (1994) Micromachined jets for manipulation of macro flows. In: Solid-state sensor and actuator workshop digest. Hilton Head, SC, pp 243-247
3. Coe DJ et al (1995) Addressable micromachined jet arrays. In: Proceedings of the transducers '95. Stockholm, Sweden, pp 329-332
4. Muller MO et al (2000) Thrust performance of micromachined synthetic jets. In: AIAA fluids 2000 conference. Denver, Colorado, pp 2000-2404
5. Okusako T et al (1994) Dissipation of contact electrified electrons on dielectric thin films with silicon substrate. Jpn J App 1 Phys 33:L959-L961
6. Parviz BA et al (2000) A wafer integrated array of micromachined electrostatically driven ultrasonic resonators for microfluidic applications. In: Proceedings of the 13th IEEE MEMS international conference. Miyazaki, Japan, pp 34-39
7. Parviz BA et al (2001) Performance of ultrasonic electrostatic resonators for use in micro propulsion. In: Proceedings of the 14th IEEE MEMS international conference. Interlaken, Switzerland, pp 586-589
8. Parviz BA, Najafi K, Muller MO, Bernal LP, Washabaugh PD (2005) Electrostatically driven synthetic microjet arrays as a propulsion method for micro flight. Part I: principles of operation, modeling, and simulation. Microsyst Technol DOI 10.1007/s00542-005-0599-0
9. Wibbeler J et al (1998) Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems. Sens Actuators A71:74-80
10. Wolffenbuttel RF, Wise KD (1994) Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature. Sens Actuators A43:223-229