Wafer-integrated array of micromachined electrostatically-driven ultrasonic resonators for microfluidic applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 34-39

  Parviz, B A ^a   Chou, T K ^a   Zhang, C ^a   Najafi, K ^a   Muller, M O ^a   Bernal, L P ^a   Washabaugh, P ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTROSTATICS; ETCHING; INTERFEROMETRY; MICROACTUATORS; MICROMACHINING; RESONATORS; SILICON WAFERS; ULTRASONIC DEVICES;

DEEP SILICON ETCHING; ELECTROSTATICALLY-DRIVEN ULTRASONIC RESONATORS; HELMHOLTZ RESONATORS; WAFER-INTEGRATED ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692517     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)