Performance of ultrasonic electrostatic resonators for use in micro propulsion

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 586-589

  Parviz, Babak A ^a   Allen Chou, T K ^a   Zhang, Chunbo ^a   Najafi, Khalil ^a   Muller, Michael O ^a   Washabaugh, Peter D ^a   Bernal, Luis P ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC STREAMING; AIRCRAFT PROPULSION; ANEMOMETERS; COUPLED CIRCUITS; ELECTROSTATICS; IMAGING TECHNIQUES; INTERFEROMETRY; JETS; RESONATORS; SILICON WAFERS; ULTRASONIC APPLICATIONS;

MICRO PROPULSIONS;

MINIATURE AUTOMOBILES;

EID: 0034998566     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906609     Document Type: Article

References (0)