A piezoelectric unimorph actuator based precision positioning miniature walking robot

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 1, Issue , 2005, Pages 176-182

  Son, Kwon Joong ^b   Kartik, Venkataraman ^c   Wickert, Jonathan A ^b   Sitti, Metin ^a,b  

^a IEEE   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOELECTRIC RELATIONS; PIEZOELECTRIC UNIMORPH ACTUATOR; PRECISION POSITIONING; WALKING ROBOTS;

ACTUATORS; HAMILTONIANS; ROBOTICS; ROBOTS; SIGNAL PROCESSING; SOFTWARE PROTOTYPING; VELOCITY;

PIEZOELECTRIC DEVICES;

EID: 27644461903     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. H. Aoyama, "Precise miniature robots and desktop flexible production," Proc. of the Int. Workshop on Microfactories, Tsukuba, Japan, pp. 145-156, 1998.
2. A. Ferreira, and J. G. Fontaine, "Dynamic Modeling and Control of a Conveyance Microrobotic System Using Active Friction Drive," IEEE/ASME Trans. Mechatronics, Vol. 8, No. 2, pp. 188 - 202, Jun. 2003.
3. S. Martel, S. Riebel, T. Koker, M. Sherwood and I. Hunter, "Large-scale nanorobotic factory automation based on the NanoWalker technology," 8th IEEE In. Conf. on Emerging Technologies and Factory Automation, Nice, France, vol. 2, pp. 591-597, 2001.
4. C. Stefanini, M.C. Carrozza, P. Dario, "A Mobile Microrobot Driven by a New Type of Electromagnetic Micromotor," 7th IEEE Int. Symp. on Micro Machine and Human Science, pp. 195-201, 1996.
5. T. Kim, J. Park, D. H. Kim, K. I. Lee, "Compact 3-DOF Mobile Microrobot for Micro/Nano Manipulation System." Proc. Int. Conf. on Control, Automation and Systems, pp. 947-951, Korea, 2002.
6. Y. Egashira, K. Kosaka, S. Takada, T. Iwabuchi, T. Baba, S. Moriyama, T. Harada, K. Nagamoto, A. Nakada, H. Kubota, T. Ohim, "0.69 nm Resolution Ultrasonic Motor for Large Stroke Precision Stage," IEEE-NANO, pp397-402, 2001.
7. P.E. Kladitis, V. M. Bright, K. F. Harsh, Y.C. Lee, "Prototype Microrobots for Micro Positioning in a Manufacturing Process and Micro Unmanned Vehicles." Proc. IEEE MEMS'99, Orlando, pp. 570-575, 1999.
8. T. Ebefors, J. U. Mattsson, E. Kälvesten, G. Stemme, "A Walking Silicon Micro-Robot," 10th Int. Conf. on Solid-State Sensors and Actuators(Tranducers'99), Japan, pp. 1202-1205, 1999.
9. T. Koynagi, R. Fukui, A. Torii, A. Ueda, "Miniature Robots with Three Degrees of Freedom," IEEE Int. Symp. On Micromechatronics and Human Science, pp. 207-212, 2000.
10. T. Tanikawa, T. Arai, P. Ojala, M. Saeki, "Calibration and Basic Motion of a Micro Hand Module." Proc. IEEE Int. Conf. on Robotics and Automation, pp 1674-1679, 1995.
11. L. Juhas, "Development of Platform for Micro-Positioning Actuated by Piezo-Legs," Proc. IEEE Int. Conf. on Robotics and Automation, pp. 3647-3653, San Francisco, 2000.
12. H. Aoyama, O. Fuchiwaki, "Flexible Micro-Processing by Multiple Micro Robots in SEM," Proc. IEEE Int. Conf. on Robotics and Automation, pp. 3429-3434, Korea, 2001,
13. K. Uchino, "Piezoelectric Ultrasonic Motors: Overview," Smart Mater. Struct., 7, pp. 273-285, 1998
14. P. L. Moal, E. Joseph, J. Ferniot, "Mechanical Energy Transductions in Standing Wave Ultrasonic motors: Analytical Modeling and Experimental Investagations," Eur. J. Mech A/Solids, vol 19, pp. 849-771, 2000.
15. S. He, W. Chen, X. Tao, Z. Chen, "Standing Wave Bi-Directional Linearly Moving Ultrasonic Motor," IEEE Trans. Ultrasonics, Ferro. & Freq. Control, vol.45, Number 5, pp 1133-1139, 1998.
16. W. W. Law, W. Liao, J Huang, "Vibration Control of Structures with Self-Sensing Piezoelectric Actuators Incorporating Adaptive Mechanisms," Smart Mater. Struct., 12, pp. 720-730, 2003.
17. Q. Wang, X. Du, B. Xu, L. Cross, "Electromechanical Coupling and Output Efficiency of Piezoelectric Bending Actuators," IEEE Trans. Ultrasonics, Ferro. & Freq. Control, vol. 46, pp. 638 - 646, 1999.
18. S. Martel, A. Saraswat, A. Michel, I. Hunter, "Preliminary Evaluation and Experimentation of the Push-Slip Method for Achieving Micrometer and Sub-Micrometer Step Sizes with a Miniature Piezo-Actuated Three-Legged Robot Operating under High Normal Forces," Proc. SPIE, Microrobotics and Microassembly, vol. 4194, Boston, pp. 141-148, 2000.