Flexible micro-processing by multiple micro robots in SEM

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2001, Pages 3429-3434

  Aoyama, H ^a   Fuchiwaki, O ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

Collaboration; Fiber guided YAG laser; Micro manipulation; Micro processing; Micro robot; Real time SEM monitoring; Remote operation

Indexed keywords

COMPUTER VISION; LASER APPLICATIONS; MICROACTUATORS; MICROMANIPULATORS; MICROPROCESSOR CHIPS; REMOTELY OPERATED VEHICLES; SCANNING ELECTRON MICROSCOPY;

MICRO ROBOTS;

MOBILE ROBOTS;

EID: 0034861641     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Miniaturized autonomous robot
2. Integrating a complex electronic system in a small scale autonomous instrumented robot: The NanoWaker Project
3. Automated micromanipulation desftopstation based on mobaile pie zoelectric microrobots
4. In-pipe wireless micro robot
5. Microfactory and microlathe
6. Desktop flexible manufacturing system by movable miniature robots
7. Construction of nano manufacturing world as a desk-top factory