Impact of slot location on thermoelastic dissipation in micromechanical resonators

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 597-600

  Candler, Rob N ^a   Hopcroft, Matt ^a   Low, Carrie W ^b   Chandorkar, Saurabh ^a   Kim, Bongsang ^a   Varghese, Mathew ^c   Duwel, Amy ^c   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

^b Stanford University   (United States)

^c CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

Quality factor; Resonator; Thermoelastic Dissipation

Indexed keywords

MICROMECHANICAL RESONATORS; QUALITY FACTOR; THERMAL DOMAINS; THERMOELASTIC DISSIPATION;

ENERGY DISSIPATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; Q FACTOR MEASUREMENT; THERMOELASTICITY;

RESONATORS;

EID: 27544483581     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496488     Document Type: Conference Paper

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