Diamond micro-Schottky emitter with an integrated heating element

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 778-781

  Bae, Joon Hyung ^a   Minh, Phan Ngoe ^a,b   Ono, T ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b INSTITUTE OF MATERIALS SCIENCE   (Viet Nam)

Author keywords

Brightness; Carbon nanotubes; Electron beams; Electron emission; Fabrication; Heating; Lithography; Scanning electron microscopy; Silicon; Stability

Indexed keywords

ACTUATORS; CARBON; CARBON NANOTUBES; CONVERGENCE OF NUMERICAL METHODS; DIAMOND DEPOSITS; DIAMONDS; ELECTRIC FIELDS; ELECTRIC HEATING ELEMENTS; ELECTRON BEAMS; ELECTRON EMISSION; ELECTRON SOURCES; ELECTRONS; FABRICATION; HEATING; LITHOGRAPHY; LUMINANCE; MICROSYSTEMS; SCANNING ELECTRON MICROSCOPY; SILICON; THRESHOLD VOLTAGE; TRANSDUCERS; YARN;

BORON DOPED DIAMOND; DIAMOND DEPOSITION; EMISSION PATTERN; HEATING POWER; HIGH BRIGHTNESS; LOW THRESHOLD VOLTAGE; MOLDING TECHNIQUES; SCHOTTKY EMITTER;

SOLID-STATE SENSORS;

EID: 27544481205     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215589     Document Type: Conference Paper

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